Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495889 | Beam homogenizer, illumination system and metrology system | Markus Franciscus Antonius Eurlings, Teunis Willem Tukker, Johannes Matheus Marie De Wit, Stanislav Smirnov | 2019-12-03 |
| 10423077 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw | 2019-09-24 |
| 10317805 | Method for monitoring a characteristic of illumination from a metrology apparatus | Jolanda Theodora Josephina Schmetz-Schagen, Hugo Augustinus Joseph Cramer, Bastiaan Onne Fagginger Auer | 2019-06-11 |
| 10191391 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw | 2019-01-29 |