Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423077 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-09-24 |
| 10353298 | Method of measuring a target, metrology apparatus, polarizer assembly | Nitesh Pandey | 2019-07-16 |
| 10191391 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Armand Eugene Albert Koolen, Gerbrand Van Der Zouw | 2019-01-29 |