Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437159 | Measurement system, lithographic system, and method of measuring a target | Teunis Willem Tukker, Amandev Singh | 2019-10-08 |
| 10423077 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen | 2019-09-24 |
| 10338401 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Martin Jacobus Johan Jak, Martin Ebert | 2019-07-02 |
| 10303064 | Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method | Sebastianus Adrianus GOORDEN, Teunis Willem Tukker, Johannes Matheus Marie De Wit, Jonas Mertes | 2019-05-28 |
| 10215954 | Focus monitoring arrangement and inspection apparatus including such an arrangement | — | 2019-02-26 |
| 10191391 | Metrology method and apparatus, computer program and lithographic system | Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen | 2019-01-29 |