Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379445 | Metrology method, target and substrate | Martin Jacobus Johan Jak, Arie Jeffrey Den Boef | 2019-08-13 |
| 10338401 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Jacobus Johan Jak | 2019-07-02 |
| 10254658 | Metrology method, target and substrate | Daan Maurits Slotboom, Arie Jeffrey Den Boef | 2019-04-09 |