Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Mohammadreza Hajiahmadi, Grzegorz Grzela +1 more | 2019-11-19 |
| 10386176 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2019-08-20 |
| 10379445 | Metrology method, target and substrate | Arie Jeffrey Den Boef, Martin Ebert | 2019-08-13 |
| 10338401 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Gerbrand Van Der Zouw, Martin Ebert | 2019-07-02 |
| 10310389 | Method of measuring, device manufacturing method, metrology apparatus, and lithographic system | Nitesh Pandey, Jin LIAN, Samee Ur Rehman | 2019-06-04 |
| 10289008 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | — | 2019-05-14 |