Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386176 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2019-08-20 |
| 10331043 | Optimization of target arrangement and associated target | Johannes Marcus Maria Beltman, Xing Lan Liu, Hendrik Jan Hidde Smilde, Richard Johannes Franciscus Van Haren | 2019-06-25 |