Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474045 | Lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma +6 more | 2019-11-12 |
| 10386176 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2019-08-20 |
| 10331043 | Optimization of target arrangement and associated target | Henricus Wilhelmus Maria Van Buel, Johannes Marcus Maria Beltman, Hendrik Jan Hidde Smilde, Richard Johannes Franciscus Van Haren | 2019-06-25 |