Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi +1 more | 2019-11-19 |
| 10474043 | Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Maurits Van Der Schaar, Erik Johan Koop, Victor Emanuel Calado, Si-Han Zeng | 2019-11-12 |
| 10310388 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Hans Van Der Laan, Alberto Da Costa Assafrao, Chien-Hung Tseng, Jay Jianhui Chen | 2019-06-04 |