Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474043 | Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Maurits Van Der Schaar, Grzegorz Grzela, Victor Emanuel Calado, Si-Han Zeng | 2019-11-12 |
| 10274849 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Reiner Maria Jungblut | 2019-04-30 |