Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi, Grzegorz Grzela +1 more | 2019-11-19 |
| 10474043 | Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method | Maurits Van Der Schaar, Grzegorz Grzela, Erik Johan Koop, Victor Emanuel Calado, Si-Han Zeng | 2019-11-12 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Simon Philip Spencer Hastings, Alberto Da Costa Assafrao, Lukasz Jerzy Macht | 2019-11-05 |
| 10437163 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Stefan Cornelis Theodorus Van Der Sanden | 2019-10-08 |
| 10261427 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Yue-Lin Peng, Jen-Yu Fang, Arie Jeffrey Den Boef, Alexander Straaijer +1 more | 2019-04-16 |