Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Lukasz Jerzy Macht | 2019-11-05 |
| 10310388 | Metrology method and apparatus and associated computer product | Adam Jan URBANCZYK, Hans Van Der Laan, Grzegorz Grzela, Chien-Hung Tseng, Jay Jianhui Chen | 2019-06-04 |