Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi +1 more | 2019-11-19 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Simon Philip Spencer Hastings, Alberto Da Costa Assafrao | 2019-11-05 |