Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Patrick Warnaar, Martin Jacobus Johan Jak, Grzegorz Grzela +1 more | 2019-11-19 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Arie Jeffrey Den Boef, Farzad Farhadzadeh | 2019-10-22 |