Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Mohammadreza Hajiahmadi, Farzad Farhadzadeh | 2019-10-22 |
| 10295913 | Inspection method and apparatus, and corresponding lithographic apparatus | Scott Anderson Middlebrooks, Rene A. M. Pluijms, Martyn John Coogans | 2019-05-21 |