Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324379 | Lithographic apparatus and method | Cedric Affentauschegg, Milenko Jovanovic, Richard Johannes Franciscus Van Haren, Robertus Wilhelmus Van Der Heijden | 2019-06-18 |
| 10317191 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more | 2019-06-11 |
| 10274849 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Erik Johan Koop | 2019-04-30 |