Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503087 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Arend Johannes Donkerbroek, Pietro Andricciola, Ewoud Frank Van West | 2019-12-10 |
| 10274849 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Erik Johan Koop, Reiner Maria Jungblut | 2019-04-30 |