Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503087 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Arend Johannes Donkerbroek, Ewoud Frank Van West | 2019-12-10 |