Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495990 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Jasper Menger, Paul Cornelius Hubertus Aben | 2019-12-03 |
| 10317191 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2019-06-11 |