Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495990 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Paul Cornelius Hubertus Aben, Everhardus Cornelis Mos | 2019-12-03 |
| 10274834 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2019-04-30 |