Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444632 | Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate | Pieter Jacob Kramer, Martinus Hendrikus Antonius Leenders, Bart Dinand Paarhuis | 2019-10-15 |
| 10254658 | Metrology method, target and substrate | Arie Jeffrey Den Boef, Martin Ebert | 2019-04-09 |