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Support apparatus, lithographic apparatus and device manufacturing method |
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2019-12-24 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-11-26 |
| 10451973 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-10-22 |
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Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate |
Daan Maurits Slotboom, Pieter Jacob Kramer, Bart Dinand Paarhuis |
2019-10-15 |
| 10386725 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
2019-08-20 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +1 more |
2019-07-16 |
| 10185231 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Sjoerd Nicolaas Lambertus Donders, Harry Sewell, Louis John Markoya, Marcus Martinus Petrus Adrianus Vermeulen, Diane Elaine Markoya |
2019-01-22 |
| 10175585 |
Lithographic apparatus and a method of operating the apparatus |
Robert Douglas Watso, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +7 more |
2019-01-08 |