| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas, Martijn Houben +7 more |
2019-12-31 |
| 10495984 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-12-03 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2019-11-19 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer, Jeroen Johannes Sophia Maria Mertens +20 more |
2019-04-09 |
| 10209629 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-02-19 |
| 10191395 |
Thermal conditioning unit, lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken |
2019-01-29 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |
| 10175585 |
Lithographic apparatus and a method of operating the apparatus |
Robert Douglas Watso, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +7 more |
2019-01-08 |