Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481502 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Koen Steffens +8 more | 2019-11-19 |
| 10372044 | Substrate table, a lithographic apparatus and a device manufacturing method | Nicolaas Ten Kate | 2019-08-06 |
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda +1 more | 2019-06-18 |
| 10254660 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2019-04-09 |
| 10245641 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2019-04-02 |
| 10236203 | Lithographic apparatus substrate table and method of loading a substrate | Mahdiar Valefi | 2019-03-19 |
| RE47237 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Sergei Shulepov | 2019-02-12 |
| 10203612 | Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus | Takeshi Kaneko, Joost Jeroen Ottens | 2019-02-12 |
| 10203611 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Koen Steffens, Takeshi Kaneko +5 more | 2019-02-12 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET, Siegfried Alexander Tromp +1 more | 2019-01-29 |