Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Siegfried Alexander Tromp +1 more | 2019-01-29 |