Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451981 | Measurement substrate, a measurement method and a measurement system | Jingshi Li, Miao Yu | 2019-10-22 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET, Siegfried Alexander Tromp +1 more | 2019-01-29 |