Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |
| 10222711 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal | 2019-03-05 |
| 10203612 | Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus | Takeshi Kaneko, Raymond Wilhelmus Louis Lafarre | 2019-02-12 |
| 10180629 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2019-01-15 |