Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222711 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2019-03-05 |
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst | 2019-02-26 |