Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2019-02-26 |