| 10503084 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +15 more |
2019-12-10 |
| 10503086 |
Lithographic apparatus and device manufacturing method |
Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2019-12-10 |
| 10466599 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Paul Corné Henri DE WIT |
2019-11-05 |
| 10416572 |
Positioning system, method to position, lithographic apparatus and device manufacturing method |
Wim Symens, Bas JANSEN |
2019-09-17 |
| 10409175 |
Lithographic apparatus and device manufacturing method |
Cornelius Adrianus Lambertus De Hoon, Marc Wilhelmus Maria Van Der Wijst, Thijs Verhees, Sander Kerssemakers |
2019-09-10 |
| 10338483 |
Actuator system and lithographic apparatus |
Robbert Edgar Van Leeuwen |
2019-07-02 |
| 10310392 |
Positioning device, lithographic apparatus and device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Engelbertus Antonius Fransiscus Van Der Pasch |
2019-06-04 |
| 10261428 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2019-04-16 |
| 10248027 |
Projection system |
Raoul Maarten Simon Knops, Bob Streefkerk, Christiaan Louis Valentin, Jan Bernard Plechelmus Van Schoot, Wilhelmus Franciscus Johannes Simons +4 more |
2019-04-02 |
| 10234774 |
Lithographic apparatus |
— |
2019-03-19 |
| 10216093 |
Projection system and minor and radiation source for a lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal |
2019-02-26 |
| 10209634 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Engelbertus Antonius Fransiscus Van Der Pasch, Christiaan Alexander Hoogendam, Bernardus Antonius Johannes Luttikhuis |
2019-02-19 |
| 10191389 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2019-01-29 |
| 10191392 |
Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator |
Johannes Adrianus Antonius Theodorus Dams, Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Simon Bernardus Cornelis Maria Martens, Antonius Franciscus Johannes De Groot |
2019-01-29 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +16 more |
2019-01-15 |
| 10175587 |
Lithographic apparatus and device manufacturing method |
Marcus Joseph Elisabeth Godfried Breukers, Marcel François Heertjes |
2019-01-08 |