Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10175587 | Lithographic apparatus and device manufacturing method | Hans Butler, Marcus Joseph Elisabeth Godfried Breukers | 2019-01-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10175587 | Lithographic apparatus and device manufacturing method | Hans Butler, Marcus Joseph Elisabeth Godfried Breukers | 2019-01-08 |