Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508896 | Measurement substrate and a measurement method | Stoyan Nihtianov, Ruud Hendrikus Martinus Johannes Bloks, Johannes Paul Marie De La Rosette, Thibault Simon Mathieu Laurent, Kofi Afolabi Anthony Makinwa +1 more | 2019-12-17 |
| 10466585 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2019-11-05 |
| 10310392 | Positioning device, lithographic apparatus and device manufacturing method | Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch | 2019-06-04 |
| 10192772 | Substrate table and lithographic apparatus | Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET +1 more | 2019-01-29 |