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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2019-12-31 |
| 10508896 |
Measurement substrate and a measurement method |
Stoyan Nihtianov, Ruud Hendrikus Martinus Johannes Bloks, Johannes Paul Marie De La Rosette, Kofi Afolabi Anthony Makinwa, Patricius Jacobus Neefs +1 more |
2019-12-17 |
| 10495985 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen MERCADO CARMONA |
2019-12-03 |
| 10481502 |
Object holder and lithographic apparatus |
Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2019-11-19 |
| 10324382 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2019-06-18 |
| 10203611 |
Lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2019-02-12 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |