Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520837 | Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more | 2019-12-31 |
| 10481502 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more | 2019-11-19 |
| 10453734 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Thomas POIESZ, Abraham Alexander Soethoudt | 2019-10-22 |
| 10324382 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2019-06-18 |