Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514615 | Support apparatus, lithographic apparatus and device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Frank Pieter Albert Van Den Berkmortel | 2019-12-24 |
| 10453734 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Martijn Houben, Abraham Alexander Soethoudt | 2019-10-22 |
| 10353303 | Lithographic apparatus and method for loading a substrate | Abraham Alexander Soethoudt | 2019-07-16 |
| 10310393 | Substrate support, method of compensating unflatness of an upper surface of a substrate, lithographic apparatus and device manufacturing method | — | 2019-06-04 |