Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514615 | Support apparatus, lithographic apparatus and device manufacturing method | Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Evelyn Wallis Pacitti, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel | 2019-12-24 |
| 10410914 | Methods for providing lithography features on a substrate by self-assembly of block copolymers | Sander Frederik Wuister, Emiel Peeters | 2019-09-10 |