Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514615 | Support apparatus, lithographic apparatus and device manufacturing method | Andre Bernardus Jeunink, Robbert Arij Jeroen De Jong, Martinus Hendrikus Antonius Leenders, Thomas POIESZ, Frank Pieter Albert Van Den Berkmortel | 2019-12-24 |