Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453734 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Thomas POIESZ, Martijn Houben | 2019-10-22 |
| 10353303 | Lithographic apparatus and method for loading a substrate | Thomas POIESZ | 2019-07-16 |