Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495985 | Lithographic apparatus and device manufacturing method | Günes NAKIBOGLU, Frank Johannes Jacobus Van Boxtel, Maria del Carmen MERCADO CARMONA, Thibault Simon Mathieu Laurent | 2019-12-03 |
| 10216102 | Lithographic apparatus and device manufacturing method | Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Engelbertus Antonius Fransiscus Van Der Pasch, Franciscus Van De Mast | 2019-02-26 |
| 10191393 | Lithographic apparatus, and device manufacturing method | Marcel Koenraad Marie Baggen, Fransiscus Mathijs Jacobs, Jeroen Arnoldus Leonardus Johannes Raaymakers, Frank Pieter Albert Van Den Berkmortel, Marc Wilhelmus Maria Van Der Wijst | 2019-01-29 |
| 10191395 | Thermal conditioning unit, lithographic apparatus and device manufacturing method | Johannes Henricus Wilhelmus Jacobs | 2019-01-29 |