Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409175 | Lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Thijs Verhees, Sander Kerssemakers | 2019-09-10 |
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal | 2019-02-26 |
| 10191393 | Lithographic apparatus, and device manufacturing method | Jan Steven Christiaan Westerlaken, Marcel Koenraad Marie Baggen, Fransiscus Mathijs Jacobs, Jeroen Arnoldus Leonardus Johannes Raaymakers, Frank Pieter Albert Van Den Berkmortel | 2019-01-29 |