Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514618 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2019-12-24 |
| 10466585 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2019-11-05 |
| 10401723 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Jozef Maria Finders +6 more | 2019-09-03 |
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2019-02-26 |
| 10180629 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2019-01-15 |