Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416572 | Positioning system, method to position, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2019-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416572 | Positioning system, method to position, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2019-09-17 |