Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10338483 | Actuator system and lithographic apparatus | Hans Butler | 2019-07-02 |
| 10331045 | Position measurement system and lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen | 2019-06-25 |
| 10289011 | Position measurement system, interferometer and lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch | 2019-05-14 |