Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191392 | Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator | Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Simon Bernardus Cornelis Maria Martens, Hans Butler, Antonius Franciscus Johannes De Groot | 2019-01-29 |