Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10228626 | Movable support and lithographic apparatus | Theo Anjes Maria Ruijl, Christiaan Louis Valentin, Christian Werner | 2019-03-12 |
| 10191392 | Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator | Johannes Adrianus Antonius Theodorus Dams, Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Simon Bernardus Cornelis Maria Martens, Hans Butler | 2019-01-29 |