Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems | 2019-10-22 |
| 10345712 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more | 2019-07-09 |
| RE47237 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre | 2019-02-12 |