Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2019-10-22 |
| 10437162 | Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system | Jon David Tedrow, Colin Michael Odneal | 2019-10-08 |