Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509326 | Lithographic apparatus and device manufacturing method | Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more | 2019-12-17 |
| 10451980 | Substrate table, immersion lithographic apparatus and device manufacturing method | Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems | 2019-10-22 |
| 10274832 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Jacobus Johannus Leonardus Hendricus Verspay, Hans Jansen | 2019-04-30 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |