Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503084 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more | 2019-12-10 |
| 10274832 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Hans Jansen, Marco Koert Stavenga | 2019-04-30 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |
| 10248033 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2019-04-02 |