Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429741 | Lithographic apparatus and a method of operating the apparatus | Jeroen Peter Johannes Bruijstens, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more | 2019-10-01 |
| 10345712 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more | 2019-07-09 |
| 10241418 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Kornelis Tijmen Hoekerd +5 more | 2019-03-26 |
| 10222701 | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method | Chuangxin Zhao, Sander Baltussen, Pär Mårten Lukas Broman, Cristian Bogdan Craus, Jan Groenewold +4 more | 2019-03-05 |