Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222701 | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method | Chuangxin Zhao, Sander Baltussen, Pär Mårten Lukas Broman, Richard Joseph Bruls, Jan Groenewold +4 more | 2019-03-05 |